From FEOL to BEOL – we’re your partner for temperature measurement!

Semiconductors : Temperature measurement technology for semiconductor manufacturing

Microprocessors or semiconductor chips are everywhere you look nowadays, in everything from coffee machines to industrial servers. Temperature sensors are required throughout the semiconductor manufacturing process: from wafer fabrication and doping to final metalization and packaging. RÖSSEL-Messtechnik precisely targets the specific manufacturing conditions faced in the semiconductor industry. Our expertise lies in the use of special materials and material combinations to facilitate even the most sensitive applications. This involves the use of quartz glass and combinations with ceramics for quartz, sapphire and silicon thermowells, for examples.
Pressure and vacuum-tight thermocouples, high-temperature thermocouples and corrosion-resistant sensors for etching processes are just a number of our areas of expertise at RÖSSEL-Messtechnik. Designed with the semiconductor industry in mind, RÖSSEL-Messtechnik runs a class 5 clean room to ensure we consistently meet the strictest quality requirements.

Whatever the process, our experts are the first point of call!

  • Class 5 clean room
  • Acid-resistant sensors for etching processes
  • Pressure and vacuum-tight sensors
  • Quartz glassblowers available at any time
  • Sensors with extremely short response times

“Looking to optimize your chip yield with smart measurement data?
Get in touch!”

Jörg Reichelt
Semiconductor expert
Etching processes

Resistance thermometers facilitate high-precision temperature measurement for etching processes in semiconductor manufacturing. Special sheaths made of acid-resistant plastics protect the temperature sensors from acids and vapors.

CVD and PVD coating processes

Only thermocouples are used to physically or chemically separate gas in horizontal and vertical furnaces.
Spike thermocouples are used on the surfaces of process tubes to guide the heat. They are connected to special ceramic fasteners that optimally press the sensor against the surface of the quartz. Profile thermocouples for process monitoring are fitted inside. Wafers with thermocouples for direct process monitoring (QS) are used to calibrate and determine the temperature profile in the furnace.

Conditioning plants

We produce special multi-step thermocouples and other products for measuring temperatures in doping systems. They are primarily used as 5-point multi-point thermocouples and made of noble metals. The use of quartz glass and ceramic combination are adapted to the special conditions in the doping systems.

Crystal growing process (Czochralski process)

Special high-temperature thermocouples are used to measure temperatures in these crystal-growing systems and they need to be able to withstand changing pressure conditions: from high vacuum states to a pressure of 200 bar.

Packaging process (backend process)

In the field of packaging manufacturing, thermometers need to measure temperatures very rapidly when liquid plastic encases the chip. As a result, only very thin yet robust sheathed thermocouples with extremely short response times are used for this purpose.

Increased chip yield thanks to profile temperature measurement

Assuring the quality of manufacturing processes is crucial for chip yield in the semiconductor industry. In wafer coating, miniature thermocouples are used to ensure uniform coating at temperatures of 700°C. The challenge lies in tracking the processes with as many sensors as possible yet without any noticeable effects. RÖSSEL-Messtechnik has developed a test wafer that can be equipped with almost any number of sensors and also used in a vacuum chamber. The sensors are attached without adhesive and can be removed and recalibrated without causing any damage, ensuring maximum process quality paired with resource and cost savings.

RÖSSEL-Messtechnik – your certified partner

As a leading manufacturer of temperature measuring technology for industrial and research purposes, we meet the strictest production standards. With internationally recognized approvals and calibrations, we offer quality you can rely on around the globe.

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